MEMS Sensor Design and Fabrication

Fabrication on Acoustic Sensor

Mr. Rudresha K.J. Asst. Prof. of ECE Dept and Coordinator in Center for Nanomaterials and MEMS at NMIT attended the hands-on workshop at CeNSE IISc (in 2014) under the Indian NanoUser's Program (INUP). His proposal on fabrication, packaging and characterization of acoustic sensor is accepted by IISc and the same will be soon be fabricated. The device that will be fabricated is novel in that it has three wafer bonding process. This is the first time that IISc is fabricating a device of this type.

In 2014-2015 : Initiative from NMIT to become the nodal center for the consortium of colleges post NPMASS sponsorship

Current Activities

Comb Drive Structure using SOIMUMPs Process
Parallel Plate Structure using PolyMUMPs Process
Circular Diaphragm
Square Diaphragm
Temperature profile | Power v/s Temperature

NMIT staff who have undergone Hands-on training at INUP IISc.